This is the homepage of the Vacuum Society of Japan (VSJ). VSJ is a member of IUVSTA, the International Union for Vacuum Science, Technique, and Applications.

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The 12th International Symposium on Sputtering and Plasma Processes (ISSP2013), July 10-12, 2013, Kyoto, Japan The Joint Annual Symposium of the Vacuum Society of Japan and the Surface Science Society of Japan (SVSS'13), 54th Annual Symposium (ASVSJ-54), November 26-28, 2013, Tsukuba, Japan